Abstract
In this paper we performed a numerical analysis of middle infrared antireflection microstructures with elliptical holes. We used COMSOL Multiphysics finite element method analysis commercial software. The calculation results revealed the qualitative influence of structure surface imperfections and non-symmetry on transmission spectra for different polarizations. This fact has to be taken into account for the design of polarization-independent antireflection microstructures.
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