Abstract
Numerical aperture NA and partial coherence sigma optimization in optical lithography is investigated for 100 nm dense lines under annular illumination and quadrupole illumination. Depth of focus (DOF) is calculated at different NA and sigma settings using PROLITH software. Based on the calculations of DOF, the NA and sigma settings are optimized by finding the values to maximize the DOF. At the optimum NA and sigma settings for 100 nm dense lines, the imaging performance is analyzed for semi-dense and isolated lines.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.