Abstract
The shock wave and the micro-jet generated by the laser-induced cavitation provide a major impact force for micro-stamping. However, the micro-jet generated by the collapse of the bubble is a high-speed and high-pressure transient process. According to the dynamic of cavitation, the finite element method is used to establish the model of a cavitation bubble in a hollow channel, and its consequent impact micro-jet are analyzed. In addition, a high-speed camera is utilized to compare and verify the simulation results. The result shows that the velocity of micro-jet reached 33.3 m/s with a high pressure of 240MPa in hundred microseconds. Lastly, with the wavelength of energy is 532 nm, the pulse width is 7 ns and the single pulse energy is 10mJ, an array for grooves with the width of 120 μm was successfully obtained on a 40 μm thick aluminum foil.
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