Abstract
A modification of the surface structure of the hybrid coating TiN/Al_{2}O_{3} with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with an increase of the beam energy, the surface becomes more regular and uniform.
Highlights
Many objects and systems in nature exhibit a self-similar or self-affine structure [1, 2]
Self-similarity means that each segment of the initial set has the same structure as the whole object.The properties of such structures can be described by specific parameters, such as fractal dimension, Hurst exponent and others
Our calculations are based on the algorithm of two-dimensional multifractal detrended fluctuation analysis (MF-DFA) [9]
Summary
Many objects and systems in nature exhibit a self-similar or self-affine structure [1, 2]. Our calculations are based on the algorithm of two-dimensional multifractal detrended fluctuation analysis (MF-DFA) [9] This algorithm was initially was developed for investigation of the time series as a one-dimensional self-similar set [14], and later on generalized for the analysis of more complicated objects [9]. Our calculations make it possible to present a quantitative characteristic of the surface roughness, and to compare it for different samples.
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