Abstract
Numerical Analysis of the Incident ion Energy and Angle Distribution in the DC Magnetron Sputtering for the Variation of Gas Pressure
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https://doi.org/10.5757/asct.2018.27.1.19
Publication Date: Jan 31, 2018 | |
Citations: 3 | License type: cc-by-nc |
Numerical Analysis of the Incident ion Energy and Angle Distribution in the DC Magnetron Sputtering for the Variation of Gas Pressure
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