Numerical analysis of the effect of bubble distribution on multiple-bubble behavior.

Abstract

Understanding multiple-bubble behavior in a megasonic field is essential for efficient megasonic nanodevice cleaning without pattern damage. In this study, we numerically studied the effects of equilibrium radius and initial void fraction on multiple-bubble behavior and induced pressure. We analyzed the nonspherical collapse, coalescence, and breakup of bubbles in a megasonic field using a compressible, locally homogeneous model of a gas-liquid two-phase medium. Bubbles were simulated with a uniform equilibrium radius or with a bubble size distribution. Our results indicate that the bubble behavior and induced pressure depended mainly on the initial void fraction. For the case of bubbles with uniform equilibrium radius, small bubbles generated high wall pressure at large initial void fractions. When there was a size distribution, bubbles with small equilibrium radii contributed little to the wall pressure because of the damping effect of the oscillation of larger bubbles. Furthermore, the addition of a large bubble suppressed the resonant behavior of the bubbles that induced high wall pressure.