Abstract
In this paper, a numerical simulation technique suitable for device-level analysis of ion-sensitive devices (ion-sensitive field-effect-transistor (ISFET) and light-addressable potentiometric sensor (LAPS)) is presented. Models of the charge layers which develop at the electrolyte–insulator interface of an electrolyte insulator-semiconductor (EIS) system are incorporated into the device equations, thus providing a self-consistent picture of charge and field distribution within the semiconductor domain. To accomplish the simulation of LAPS devices, an AC-modulated optical generation rate has been introduced as well. A TCAD tool, based on the proposed approach, has been developed, which allows for the electrical characterization and for the extraction of circuit-simulation parameters of ion-sensitive devices. Validation of the device-analysis technique comes from the comparison between predicted electrical responses and actual device measurements.
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