Abstract

We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.

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