Abstract
In order to improve the pressure resistance(PR) of magnetic fluid reciprocating seal(MFRS) suitable for vacuum coating machines, effects of sealing gap(SG), number of pole teeth(PT), height of PT and thickness of magnet on the PR of the seal were investigated. L16 (45) orthogonal test was designed to optimize the reciprocating seal structure, and the magnetic field distribution of each test in the four-factor, four-level orthogonal test was analyzed. The statistical analyses of the results of the orthogonal tests were compared between the method of range analysis and the analysis of variance (ANOVA). The results show that the data obtained by ANOVA are more accurate, and the PR of MFRS increases by 455 kPa under the optimization of this scheme, and the optimal PR value is 318 kPa after considering the interference and limitations of practical applications, which is in line with the requirements of the PR of practical applications.
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