Abstract
ABSTRACTIn this study, nucleation time has been found to play an important role in the three-step (Hi-Lo-Hi) intrinsic gettering process. The longer the nucleation time, the higher the density of oxygen precipitates and oxidation induced stacking faults. The size of oxidation induced stacking faults, however, shrinks as the nucleation time increases. The reduction of junction leakage current indicates that gettering efficiency improves with increasing nucleation time. Oxidation induced stacking faults appear to be the dominant gettering sites.
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