Abstract
The nucleation and early stages of growth of evaporated Cd 3As 2 deposits on air-cleaved NaCl substrates at 10 -5 Torr and in the temperature range 290–690 K have been studied. The electron microscopic observations were performed on discontinuous carbon-backed films by bright and dark-field TEM and by replica methods. The structure of these films changed from amorphous hemispherical caps at substrate temperatures below 410 K, to crystalline deposits above this temperature. Above 660 K the nuclei of the shape of square-based pyramids with preferred orientation (001)Cd 3As 2(001)NaCl were formed, while at intermediate temperatures also nuclei of truncated triangular pyramidal shape with preferred plane of film growth (112)Cd 3As 2(001)NaCl appeared. Six possible main orientations of nuclei were detected. The average dimensions of nuclei increased and their density decreased with increasing substrate temperature.
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