Nucleation on substrates from the vapour phase

Abstract

Abstract Recent developments in the theory of nucleation of vapour deposits on crystalline substrates are reviewed. To facilitate comparison, the theories are formulated in a common dimensionless notation, and an examination of the major underlying assumptions reveals the basic similarity of many of them. The capture and dissociation rates are expressed in terms of the cluster geometry and the pertinent energy parameters, and from these the ‘chemical’ rate equations are set up. The following types of approximate solutions are discussed: (a) long-time asymptotic solutions, from which the conditions for saturation in the cluster concentration may be deduced, (b) a generalization of the type of approximate solution used by Logan (1969), and (c) numerical solutions employing a minimum number of simplifying assumptions. Based on a simple model, agreement between the latter two seems reasonably good. For any given set of fixed parameters (energies, geometrical constants, and arrival rate from the vapour) severa...