Abstract

The nucleation of antimony on SiO was investigated by means of transmission electron microscopy and Auger spectroscopy. It was shown that the Auger analysis permits the estimation of the activation energy of nucleation; this was in good agreement with the theory of nucleation. New experimental data for the deposition of antimony on SiO under low energy electron irradiation is presented. The electron irradiation was found to raise the critical temperature of condensation and it changes markedly the morphology of the deposit. Possible applications are discussed.

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