Abstract
The nucleation and growth of , as a function of surface condition, was investigated using in situ medium-energy ion-scattering analysis. The amount of required for saturation on the thermal oxide and on the chemical oxide was found to be 0.75 and , respectively. The growth of on the initial surface increased as a function of coverage and growth when the coverage over 1 monolayer (ML) becomes saturated when the coverage of is , which corresponds to a coverage of 1 ML . The nucleation of greatly depends on the initial surface conditions. In addition, the nucleation of has a tendency to become saturated, regardless of the initial surface conditions.
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