Abstract
Highly (100)-oriented PbTiO 3 thin films were grown on Pt/Ti/Si(100) substrates by a sol-gel method. The nucleation and growth processes were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. The chemical bondings and chemical composition of the films were also determined by X-ray photoelectron spectroscopy (XPS). A crystallization mechanism for controlling the film characteristics is presented.
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