Abstract
Nucleation and crystallization behavior of PZT thin films are studied by XRD, SEM and isothermal DTA techniques. It is found experimentally that the perovskite crystal nucleation rate is much higher than the perovskite crystallites' growth rate at the temperature of 460/spl deg/C. The crystallization centers grow into grains through swallowing the surrounding amorphous substrate. Too large grains appear in thin films due to the number of perovskite nucleus with crystallites' size greater than critical size is not enough. Dense, crack-free and perovskite PZT thin films with grain size of 0.3-0.6 /spl mu/m were obtained by optimizing the heat treatment.
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