Abstract

Proton induced X-ray emission and Rutherford backscattering spectrometry are the most often used IBA methods in conjunction with a nuclear microprobe. Their main advantages derive both from the corresponding cross sections having relatively high values and their multielemental response. μPIXE allows one to reach the spatial distribution of elements with Z>12 and μRBS permits the study of multilayered solids with a good selectivity for thin heavy element layers deposited on light substrates. Nuclear reactions on the other hand generally exhibit low cross section values but are well adapted for light element isotope measurements in any substrate. This paper intends to provide an overview of nuclear reaction spectrometry analytical capabilities using 1H, 2H, 3He or 4He microbeams. Practical performances such as selectivity, sensitivity, total analysable depth and depth resolution are discussed. Finally, application examples are presented in the following areas: metallurgy and material sciences, earth sciences and cosmochemistry, biochemistry and archaeometry.

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