Abstract

A kind of novel wind energy harvesting device with square ZnO piezoelectric thin films array structure has been investigated in the article. It is designed and fabricated for ambient wind energy on high buildings in city blocks particularly. Ordinary elements of wind energy harvesting are various windmills or turbines, they are usually expensive and noisy, and are not suitable to be used in the crowed city. The novel wind energy harvesting device is fabricated by Micro Electro Mechanical System (MEMS) technology in order to avoid the deficiencies mentioned above. The films array has a multilayer structure with five layers, and has a thickness of about 2.5μm. The maximum open circuit output voltage of the device reaches 2.81V, and its maximum output power density is 23.39nW/cm2.

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