Abstract
Barium bis chelates of 1,1,1,5,5,6,6,6-octafluoro-2,4-hexanedione (Hofhd) and 1,1,1,5,5,6,6,7,7,7-decafluoro-2,4-heptanedione (Hdfhd) have been synthesized. The volatilities of these compounds were investigated by isothermal thermogravimetric analysis (ITG) and mass spectroscopy. The new chelates sublimed in a lower temperature region (190-220 o C) and exhibited better thermal stability than conventional fluorinated barium chelates, barium hexafluoroacetylacetonate [Ba(hfa) 2 ] or barium heptafluorodimethyloctanedionate [Ba(fod) 2 ]. They were applied to the low-pressure chemical vapor deposition (CVD) of barium fluoride (BaF 2 ) thin films
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