Abstract

AbstractIn this study, the interaction between several kinds of surfactants and copper surface was examined to control the dissolution of copper during CMP. Among those surfactants, sodium dodecylsulfate (SDS), one of the conventional anionic surfactants, showed effective interaction with copper and significantly suppressed the dissolution of the copper at acidic and neutral pH ranges in a model copper CMP slurry system consisting of 3 wt% fumed silica, 1 wt% glycine, and 5 wt% hydrogen peroxide in deionized water. The inhibition performance of copper dissolution by SDS is better than that of Benzotriazole (BTA), a conventional inhibiting agent of copper dissolution in a copper CMP slurry.

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