Novel Trench Inner-Spacer Scheme to Eliminate Parasitic Bottom Transistors in Silicon Nanosheet FETs

Abstract

A novel and feasible trench inner-spacer (TIS) scheme to eliminate undesired parasitic bottom transistors (trpbt) in gate-all-around (GAA) nanosheet (NS) field-effect transistors (FETs) is proposed based on fully calibrated Technology Computer-Aided Design (TCAD) simulation. Highly doped punch-through stopper (PTS) layers are generally used to suppress trpbt. Unfortunately, trpbt is still a fatal failure factor in electrical performance degradation when the source/drain (S/D) recess is overetched. Moreover, the proposed TIS scheme prevents the diffusion of S/D dopants toward the PTS region beneath the bottom gate, thereby inhibiting the formation of trpbt. Furthermore, the TIS-NSFETs exhibit excellent immunity to overetched S/D recess depth variations. Additionally, the thermal characteristics of the TIS scheme are compared to that of the bottom oxide (BOX) scheme forming dielectrics beneath the S/D epitaxies, one of the methods used to suppress trpbt. Lattice temperature caused by self-heating and thermal resistance in the TIS-NSFETs are much lower than that in the BOX-NSFETs for both n/p-type devices. The thermal advantage of TIS-NSFETs compared to BOX-NSFETs is confirmed in both DC and AC conditions, similar to an actual operating environment. Therefore, the proposed TIS scheme is highly recommended to eliminate the undesired trpbt without critical DC/AC degradation and to resolve poor heat dissipation problems in the BOX scheme simultaneously.