Abstract

A novel theory for tilted beam propagation is established in this paper. By setting the propagation direction of the tilted beam as the new optical axis, we establish a virtual optical system that is aligned with the new optical axis. Within the first order approximation of the tilt and off-axis, the propagation of the tilted beam is studied in the virtual system instead of the actual system. To achieve more accurate optical field distributions of tilted Gaussian beams, a complete diffraction integral for a misaligned optical system is derived by using the matrix theory with angular momentums. The theory demonstrates that a tilted TEM00 Gaussian beam passing through an aligned optical element transforms into a decentered Gaussian beam along the propagation direction. The deviations between the peak intensity axis of the decentered Gaussian beam and the new optical axis have linear relationships with the misalignments in the virtual system. ZEMAX simulation of a tilted beam through a thick lens exposed to air shows that the errors between the simulation results and theoretical calculations of the position deviations are less than 2‰ when the misalignments εx, εy, εx', εy' are in the range of [−0.5, 0.5] mm and [−0.5, 0.5]°.

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