Abstract
In microelectromechanical systems (MEMS) switches, the microcontact is crucial in determining reliability and performance. In the past, actual MEMS devices and atomic force microscopes (AFM)/scanning probe microscopes (SPM)/nanoindentation-based test fixtures have been used to collect relevant microcontact data. In this work, we designed a unique microcontact support structure for improved post-mortem analysis. The effects of contact closure timing on various switching conditions (e.g., cold-switching and hot-switching) was investigated with respect to the test signal. Mechanical contact closing time was found to be approximately 1 μs for the contact force ranging from 10–900 μN. On the other hand, for the 1 V and 10 mA circuit condition, electrical contact closing time was about 0.2 ms. The test fixture will be used to characterize contact resistance and force performance and reliability associated with wide range of contact materials and geometries that will facilitate reliable, robust microswitch designs for future direct current (DC) and radio frequency (RF) applications.
Highlights
Microelectromechanical systems (MEMS) technology is widely used in applications ranging from sensing to switching technology due to its low cost, low power consumption, and small geometries [1]
Microswitches are an example of a MEMS technology that shows promising performances in direct current (DC) and radio frequency (RF) applications [2,3]
3RFc s ρ Hπ where RcDE is the resistance for elastic deformation, RcDP is the resistance for plastic deformation, ρ is the resistivity of the material, H is the hardness of the material, Fc is the contact force, R is the radius of curvature of “a-spots,” and È is the Hertzian modulus of the contacting surfaces
Summary
Microelectromechanical systems (MEMS) technology is widely used in applications ranging from sensing to switching technology due to its low cost, low power consumption, and small geometries [1]. Switching dynamics (e.g., contact force, contact closure time, and contact bounce), and microcontact surface tribology (e.g., contact resistance, contamination, adhesion, and material transfer) play the critical role in determining their reliability. For example,For an MEMS device-based test setup does notsetup allowdoes one not to measure theto contact force reliability. Example, an MEMS device-based test allow one measure thedirectly, contact and AFM, SPM, and nanoindentation are limited to cycle rates of. Fixture Assembly with Improved Contact Support Structure diagram representation of the test fixture can be illustrated as Figure 2. Was integrated thefixture test fixture to provide μN force displacement range of. It has both open loop control and close loop control options, each with the displacement range of 0–20 μm.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
