Abstract
This paper suggests a novel efficient interconnect failure diagnosis method, which is dubbed as “time of propagation delay pass fail (TPDPF),” employing time domain reflectometry (TDR). The proposed TPDPF has been applied to diagnose the interconnect failures in a high parallelism probe card with the TDR function of automatic test equipment (ATE), which has been exclusively used in calibrating the channel length skews. It has been shown that the TPDPF method could be very efficient in the diagnosis of the interconnect failures with the help of a short-end fixture (a metal wafer), which is also proposed in this paper. To check the validity of the proposed TPDPF method, an automatic probe card diagnosis system was constructed, and it turned out to take only a few minutes to diagnose the whole interconnects in a high parallelism probe card. Furthermore, the implemented diagnosis system does not require skilled hands due to its automatic execution, and it enables about a $20\times $ enhancement of the efficiency of the probe card management and wafer testing.
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