Abstract
In this article, a novel step field plate (SFP) laterally diffused metal–oxide–semiconductor (LDMOS) structure is proposed for improved breakdown voltage- ON resistance tradeoff and better RF performance. The proposed structure could be easily integrated into the CMOS process flow using four additional noncritical masks. The known materials like fully silicided polysilicon and silicon nitride (SiN) are used as FP and dielectric, respectively. The proposed design improves the device performance by uniformly distributing the electric field in the drift region. The higher drift doping for the same OFF-state breakdown voltage improves the ON resistance by <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim 2.5\times $ </tex-math></inline-formula> and ON-state breakdown voltage by <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim 2\times $ </tex-math></inline-formula> . Significant improvements in frequency behavior and flat power response are also observed. The device physics behind different observations are explained using detailed TCAD simulations.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
