Abstract
In this study, humidity-sensitive polymer layer containing phenol-formaldehyde resin prepared by spinning coating on the comb-shape type electrode followed by UV-graft polymerization of soluble monomer was performed to improve the sensitivity. In this investigation, grafting of P-styrenesulfonic acid sodium salt (NaSS) treated with hexamethyldisilazan (HMDSZ) plasma and acrylic acid (AAc) followed by isopropanol (IPA) plasma were used as monomer for UV surface graft polymerization. Results show the first one adding different ratio of phenol-formaldehyde resin. This type of sensor has linear response with %RH, and high sensitivity (impedance from 106 to 103). The impedance of second type of sensor was linear response with %RH, impedance varies from 107 to 105.
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