Abstract
A thin film structure of Pd–Al2O3 was developed as a signal plate for ultraviolet (UV) vidicon television picture tubes. The Pd–Al2O3 films were deposited using a novel sputtering method. The 20Å thick Pd layer served as a conducting plate while the 30–50Å thick Al2O3 layer functioned as a transparent protective passivation film. The obtained signal plates had a sheet resistance of 2.5kΩ and a transparency coefficient of 71% at a wavelength of 250nm, which is suitable for near-UV applications. The main advantage of vidicons equipped with such signal plates is its less than 0.05nA dark current.
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