Abstract
A new method has been devised for obtaining fast NO2 gas sensing characteristics by using detuned SnO2/SAW sensor oscillator. The deposited SnO2 thin films were polycrystalline showing XRD reflections corresponding to (101) and (211) planes of rutile structure. The frequency of the sensor remained tuned for SnO2 layer of small thickness (<90nm), and sensing response was moderate (<140kHz) with relatively slow response time and recovery time. However with increase in thickness (≥90nm), the frequency of SAW sensor detuned resulting in enhanced sensing response (≥16MHz) along with fast response time and recovery time. Independent experiments confirmed the change in elasticity of the sensing layer as the dominant sensing mechanism for SnO2/SAW sensor towards NO2 gas.
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