Abstract
Abstract Deep etch lithography like the LIGA technique combines high precision and mass production capability. It is a well suited candidate for precision micro-optics because of its unique characteristic which allows the fabrication of optical and mechanical micro-elements in the same substrate. In this paper we will focus on a novel alignment tolerant optical backplane approach well suited for automotive applications that is based on a hybrid integration of guided wave and free space micro-optics by the LIGA technique.
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