Abstract
We report a novel micro-optical systems approach for gas chromatographic detection based on plasma excitation of the eluate and subsequent emission spectroscopic evaluation. Specifically, we propose a detector architecture that integrates a microhollow cathode setup and an optical collector system on a common planar microsystems platform. The collector consists of an array of identical imaging systems that surround the microplasma and couple the emitted light side-on into fibers via which it can be fed into a spectrometer. Elliptically shaped reflector profiles ensure nearly aberration-free achromatic imaging and hence a high coupling efficiency. This is confirmed by ray-tracing simulations. An experimental demonstration of the detector module is assembled. The elliptical profiles are milled out of aluminium with diamond tools on an ultraprecision machining center. Experimental tests with a He plasma prove that a higher optical coupling efficieny than with the traditional end-on signal pickup scheme can be achieved.
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