Abstract
This study presents a pioneering method for quantifying the ratios of sp3/sp2 hybridized carbon in diamond-like carbon (DLC) films. The novelty lies in using soft X-ray emission spectroscopy (SXES), a technique not widely employed in this context. The DLC films, obtained through various deposition methods, were characterized for hydrogen content, film density, and sp3/sp2 ratio using Rutherford backscattering spectroscopy/Elastic recoil detection analysis (RBS/ERDA), X-ray reflectivity (XRR), and SXES, respectively. To ensure the reliability of the SXES method, it was validated through comparative analysis with near-edge X-ray absorption fine Structure (NEXAFS) spectroscopy, providing confidence in its accuracy. While NEXAFS provided consistent sp3/sp2 ratio measurements in hydrogen-free DLC films, its accuracy in hydrogenated DLC films was impacted due to poor accuracy when applied to this film group. In contrast, SXES demonstrated greater precision in hydrogenated and hydrogen-free DLC films, revealing sp3/sp2 ratios ranging from 36 % to 62 %, corresponding variations in hydrogen contents and film densities. These findings highlight the superior utilization of SXES in accurately determining the sp3- and sp2-hybridized carbon ratios, particularly in hydrogenated DLC films, offering a robust alternative to NEXAFS and paving the way for enhanced characterization and application in various industrial fields.
Published Version
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