Novel Low Temperature Co-Fired Ceramic Material System Composed of Dielectrics with Different Dielectric Constants

Abstract

We found that the co-firing low temperature co-fired ceramic (LTCC) materials of different dielectric constants (εr) with Cu wiring is achievable using a novel, original design. It was confirmed that the dielectric characteristics of the dielectrics designed in this study are very suitable for the use of the dielectrics in electronic components such as filters mounted in high-speed radio communication equipment. The dielectric constants of the lower- and higher-dielectric-coefficient materials were 8.1 and 44.5, respectively, which are sufficiently effective for downsizing LTCC components. Observing the co-fired interface, it was confirmed that excellent co-firing conditions resulted in no mechanical defects such as delamination or cracks. On the basis of the results of wavelength dispersive X-ray spectrometry (WDX) and X-ray diffractometry (XRD), it was confirmed that co-firing with minimal interdiffusion was realized using the same glass for both dielectrics. It is concluded that the materials developed are good for co-firing in terms of the mechanical defects and interdiffusion that appear in them.