Novel low-macroscopic-field emission cathodes for electron probe spectroscopy systems

Abstract

The current state of electron probe methods [including energy loss spectroscopy of inelastically scattered electrons (EELS)] is considered. The analysis concerning the issues of their application, challenges, and limitations is performed. Particular attention is paid to the fundamental limitations and the means to overcome those during electron probe methods’ subsequent development for the study of composite nanostructured materials. It is emphasized that the emitted electron energy spectrum dispersion (or electron energy distribution function width) is one of the main factors limiting a further increase in EELS energy resolution, although the use of direct detection sensors and monochromators allows one to approach the physical limit of this method. Novel low-macroscopic-field electron emitters are synthesized and investigated. Their properties are analyzed and compared with previously obtained specimens. Both energy and temporal resolutions of an EEL system utilizing the suggested cathodes are estimated. The comparison of its characteristics with the corresponding parameters of classical facilities is performed. The obtained results indicate the possibility to achieving a significant growth in energy and temporal resolutions as well as a decrease in the detection threshold of chemical elements with trace concentrations while maintaining relatively high emission current density values.