Novel high sensitivity accelerometer based on a microfiber loop resonator

Abstract

An optical accelerometer with a bulk-micromachined silicon proof mass and a microfiber loop resonator (MLR) sensor was developed. The MLR was fixed on the surface of the cantilever beam. The proof mass and cantilever beam were fabricated with a two-mask process. An accelerometer with a range of ±20 g and output sensitivity 624.7 mV/g was fabricated. The design, simulation, fabrication, and preliminary results are presented.