Abstract
This paper proposes a novel high-capacitance-ratio radio frequency micro-electromechanical systems (RF MEMS) switch. The proposed RF MEMS mainly consists of serpentine flexure MEMS metallic beam, comprised of coplanar waveguide (CPW) transmission line, dielectric and metal-insulator-metal (MIM) floating metallic membrane. Comparing the proposed high-capacitance-ratio MEMS switch with the ones in available literature, an acceptable insertion loss insulation, acceptable response time and high capacitance ratio (383.8) are achieved.
Highlights
In today’s competitive wireless market, compact, low cost, reconfigurable, multiband solutions are required and reconfigurable radio frequency (RF) blocks is the research hotspot
The radio frequency micro-electromechanical systems (RF MEMS) switch draws considerable attention owing to its attractive performance, as a key enabler for reconfigurable RF front-ends [1,2]
A larger off/on capacitance ratio is beneficial to high isolation performance, low actuating voltage contributes to the monolithic microwave integrated circuit (MMIC) implementation and dielectric charging causes failure of RF MEMS switch
Summary
In today’s competitive wireless market, compact, low cost, reconfigurable, multiband solutions are required and reconfigurable radio frequency (RF) blocks is the research hotspot. A larger off/on capacitance ratio is beneficial to high isolation performance, low actuating voltage contributes to the monolithic microwave integrated circuit (MMIC) implementation and dielectric charging causes failure of RF MEMS switch. The other method of high off/on capacitance ratio implementation is enlarging the gap between MEMS beam and dielectric layer [6,7]. This paper proposes a novel high-capacitance-ratio MEMS switch based on the floating metal membrane concept, without the restrictions of minimum thickness of dielectric layer and the Micromachines 2018, 9, x FOR PEER REVIEW minimum gap between beam and signal transmission line. It consists of serpentine flexure MEMS metallic beam, CPW transmission line, dielectric and metal-insulator-metal (MIM) floating metallic membrane.
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