Abstract

We report here on the fabrication and application of novel planar Hall sensors based on shallow InGaP/AlGaAs/GaAs heterostructure with a two-dimensional electron gas (2DEG) as an active layer. The sensors are developed for two kinds of experiments. In the first one, magnetic samples are placed directly on the Hall sensor. Room temperature experiments of permalloy objects evaporated onto the sensor are presented. In the second experiment, the sensor scans close over a multigranular superconducting sample prepared on a YBCO thin film. Large-area and high-resolution scanning experiments were performed at 4.2 K with the Hall probe scanning system in a liquid helium flow cryostat.

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