Novel Folding Large-Scale Optical Switch Matrix with TotalInternal Reflection Mirrors on Silicon-on-Insulator by AnisotropyChemical Etching

Abstract

A compact optical switch matrix was designed, in which light circuitswere folded by total internal reflective (TIR) mirrors. Two keyelements, 2×2 switch and TIR mirror, have been fabricated onsilicon-on-insulator wafer by anisotropy chemical etching. The 2×2switch showed very low power consumption of 140 mW and a very high speedof 8±1 μs. An improved design for the TIR mirror was developed, andthe fabricated mirror with smooth and vertical reflective facet showedlow excess loss of 0.7±0.3 dB at 1.55 μm.