Abstract

Novel deposition method of Antimony-doped tin oxide (ATO) thin films was introduced using a nanoparticle deposition system (NPDS) to fabricate an electrochromic (EC) device. NPDS is a dry deposition method that simplifies the ATO deposition process by eliminating the need for solvents or binders. In this study, an ATO EC layer was deposited using NPDS. The surface morphology and electrochemical and optical transmittance properties were characterized. The optical transmittance change in the ATO EC device was ∼35% over the wavelength range of 350–800nm, and the cyclic transmittance was stable. The ATO film deposited using NPDS, exhibited a coloration efficiency of 15.5cm2C−1. Therefore, our results suggest that ATO EC devices can be fabricated using a simple, cost-effective NPDS, which allows nanoparticles to be deposited directly without pre- or post-processing.

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