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Abstract
We propose and demonstrate a new method to realize a novel curved micro-mirror structure for vertical interconnection. To demonstrate the process, a 12-channel waveguide array with an array of curved-mirror structures was designed and fabricated. Using deep etch and photoresist reflow method, we first designed and fabricated a silicon master for subsequent UV-embossing processes of the mirror. The master was transferred onto a plain glass substrate using polymer materials and a PDMS soft mold.
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