Abstract
A novel fabrication method of ion beam-induced chemical vapor deposition with a focused ion beam system has been applied to fabricate FePt and CoPt particles. The size of the particles depends on the pattern size and frame number. The FePt particles with smallest diameter of about 110 nm were prepared. Both FePt and CoPt particles show fcc structures and soft ferromagnetic properties. Decreasing the Ga/sup +/ ion beam intensity may improve the crystallization structure of the particles. Concentric ring magnetic domain patterns have been observed in FePt and annealed CoPt particles with diameter of about 2 /spl mu/m.
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