Novel dry metal electrode with tilted microstructure fabricated with laser micromilling process

Abstract

A novel dry metal electrodes with tilted microstructure arrays was fabricated with laser micromilling process by adjusting the incident angle of the laser beam. After discussing the laser fabrication process for dry metal electrodes, the effects of the laser incident angle, width of unscanned area, laser output power, and scanning times on the shape and size of the microstructures are further discussed. Our experimental results show that the tilted angle of the surface microstructures of the dry metal electrodes depended on the laser incident angle. The heights of the surface microstructures of dry metal electrodes were greatly increased by increases of the laser output power and scanning times. Compared with vertical microstructure arrays, the developed dry metal electrodes with 60° tilted angle microstructure arrays demonstrated much lower impedances.