Abstract
In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.
Highlights
Available micromachined pressure sensors are by a vast majority based on the piezoresistive effect, where a mechanical deformation causes a change in the electrical resistance of Sensors 2010, 10 the sensing element which can be translated into a pressure signal
Strong temperature dependence of the piezoresistive coefficient π44, limited pressure range and scalability, necessity of a DC conditioning circuit, dependence to packaging induced stress and low sensitivity have ruled out these sensors in many cases
All three sensors proposed open up new possibilities for pressure measurements and have the scope to offer a solution for very sensitive pressure measurements, pressure monitoring in harsh environment or pressure monitoring inside the human body
Summary
Available micromachined pressure sensors are by a vast majority based on the piezoresistive effect, where a mechanical deformation causes a change in the electrical resistance of Sensors 2010, 10 the sensing element which can be translated into a pressure signal. All-optical sensors are unaffected by electromagnetic fields and noise and have low power consumption combined with good signal transmission, making them ideal for remote sensing. These properties makes them well-suited for a number of demanding applications, e.g., sensing in the proximity of electrical generators, power lines and inside MRI scanners as well as sensing in fuel tanks and for oil explorations. All three sensors proposed open up new possibilities for pressure measurements and have the scope to offer a solution for very sensitive pressure measurements, pressure monitoring in harsh environment or pressure monitoring inside the human body
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