Novel design for performance enhancement of a touch-mode capacitive pressure sensor: theoretical modeling and numerical simulation

Abstract

Capacitive pressure sensors have undergone a multitude of design modifications to improve their performance for various applications. This paper aims to add a novel feature to increase the capacitance generated by using a convex dome-shaped substrate electrode. The paper provides in-depth mathematical and analytical modeling that supports the proposed design. The results indicate a significant improvement in capacitance, touch-mode range, and linearity for the touch-mode capacitive pressure sensor.