Abstract
The new chloro(cyclopentadienyl)silanes Cp′SiH y Cl 3− y (Cp′=Me 4EtC 5, y=1: 1; Cp′=Me 4C 5H, y=1: 2; y=0: 3; Cp′=Me 3C 5H 2, y=1: 4 and pentachloro(cyclopentadienyl)disilanes Cp′Si 2Cl 5 (Cp′=Me 5C 5 5, Me 4EtC 5 6, Me 4C 5H 7, Me 3C 5H 2 8, Me 3SiC 5H 4 9) are synthesized in good yields via metathesis reactions. Treatment of 1– 9 with LiAlH 4 leads under Cl–H exchange to the hydridosilyl compounds Cp′SiH 3 (Cp′=Me 4EtC 5 10, Me 4C 5H 11, Me 3C 5H 2 12) and to the hydridodisilanyl compounds Cp′Si 2H 5 (Cp′=Me 5C 5 13, Me 4EtC 5 14, Me 4C 5H 15, Me 3C 5H 2 16, Me 3SiC 5H 4 17). Complexes 1– 17 are characterized by 1H, 13C, and 29Si-NMR spectroscopy, IR spectroscopy, mass spectrometry and CH-analysis. The structures of 6, 7 and 9 are determined by single-crystal X-ray diffraction analysis. Pyrolysis studies of the cyclopentadienylsilanes 10– 12 and disilanes 13– 17 show their suitability as precursors in the MOCVD process.
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