Abstract
To improve the accuracy of micro-coordinate measuring machines (CMMs) to nanometer scale, numerous hardware improvements have been studied and carried out in recent years, albeit with high costs and application limitations. Error compensation technology through software has also been applied because of its high precision, high efficiency and low cost. A global volumetric error compensation model on the basis of the Abbe and Bryan principles for micro-CMMs is proposed in this study. The volumetric errors of the general CMMs were also analyzed, and the transmission relationship between the volumetric and geometric errors was established in the proposed model. The parameters in the model, including 21 geometric errors and Abbe/Bryan offsets were measured and used to compensate for the volumetric errors. A zero-class gauge block was tested using a micro-CMM based on ISO 10360-2. With the volumetric error compensation, the standard deviations of the length measurements in the different diagonal directions were reduced by more than 65 %. Thus, the effectiveness of the proposed method was established. This study provides a general modeling method and compensation techniques of volumetric errors for people involved in accuracy improvement for CMMs and machine tools.
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