Novel Ceramic Composite Substrates for High-Density and High Reliability Packaging

Abstract

This paper presents the development and evaluation of a large-area carbon-silicon carbide (C-SiC) based composite board material that has the advantages of organic boards in terms of large-area processability and machinability at potentially low-cost while retaining the high stiffness (> 200 GPa) and Si-matched coefficient of thermal expansion (CTE) (~ 2.5 ppm/degC) of ceramics. Test vehicles were fabricated using C-SiC boards for assessing ultra-fine pitch solder joint reliability without underfill as well as the reliability of high-density wiring with microvias on the board. Finite element reliability models were developed to simulate the thermomechanical behavior of test vehicles. From the finite-element simulations as well as accelerated reliability tests, the high stiffness low-CTE C-SiC boards did not show any premature solder joint fatigue failure or dielectric cracking. Furthermore, the C-SiC boards show minimal via-pad misalignment and support the multilayer buildup structure required to achieve very high wiring density. The modeling and experimental results suggest that the low-cost large-area ceramic matrix composite (C-SiC) has superior thermomechanical properties, and is, therefore, a promising candidate substrate material for the emerging microelectronic systems.