Abstract
Carbon dioxide (CO2) is one of the major indicators of fire and therefore its measurement is very important for low-false-alarm fire detection and emissions monitoring. However, only a limited number of CO2 sensing materials exist due to the high chemical stability of CO2. In this work, a novel CO2 microsensor based on nanocrystalline tin oxide (SnO2) doped with copper oxide (CuO) has been successfully demonstrated. The CuO-SnO2 based CO2 microsensors are fabricated by means of microelectromechanical systems technology and sol-gel nanomaterial-synthesis processes. At a doping level of CuO : SnO2 = 1 : 8 (molar ratio), the resistance of the sensor has a linear response to CO2 concentrations for the range of 1% to 4% CO2 in air at 450degC. This approach has demonstrated the use of SnO2, typically used for the detection of reducing gases, in the detection of an oxidizing gas.
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