Abstract
In the semiconductor industry, the long “seasoning” time required after the installation of new ceramic components in etching equipment restricts the wafer production efficiency. This study proposes a novel and practical method for the fabrication of pre-seasoned ceramics through surface modification of Y2O3 ceramics. Fluorine-containing reactive vapors were produced by utilizing NH4F as the source. Further, the formation of yttrium oxyfluoride layers on the surfaces of Y2O3 ceramics was demonstrated. The modified surface comprises a single-crystalline phase near the interface with the Y2O3 substrate. The change in the composition, crystalline nature of the modified layer, and orientation relationship with the substrate were examined via transmission electron microscopy. The kinetics of the surface modification were studied for the sintered Y2O3 bulk as well as for practical coatings such as plasma-sprayed or PVD coatings. The proposed surface modification approach can be used to fabricate pre-seasoned Y2O3 coatings, which can significantly benefit the semiconductor industry.
Published Version
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