Novel ambient-condition solid-state synthesis route of nanocrystalline TiN thin films via spark plasma ablation deposition

Abstract

By utilizing a novel, green and efficient spark plasma ablation deposition, <10 nm size titanium nitride nanoparticles were obtained. The prepared nanopowder material can be utilized for the deposition of a nanocrystalline thin film. The solid-state synthesis was performed completely at ambient conditions, without the use of solvents and post-processing. Transmission electron microscopy confirmed the size of the nanoparticles within the range of less than 10 nm with primary particles as small as 3 nm, while selective area diffraction confirmed fits cubic titanium nitride (TiN) crystal structure. The geometry (thickness and surface roughness) of the deposited thin films could be varied depending on the sparking current and flow rate. Raman spectroscopy suggested the specific morphology that stems from the plastic deformation of nanoparticles upon collision with the substrate might influence the nanolocal structural environment due to a high surface contribution of tensile stress.