Abstract
We developed a compact and light displacement sensor applicable to systems that require wide range motions of its sensing device. The proposed sensor utilized the optical pickup unit of the optical disk drive, which has been used applied to atomic force microscopy (AFM) because of its compactness and lightness as well as its high performance. We modified the structure of optical pickup unit and made the compact sensor driver attachable to a probe head of AFM to make large rotation. The feasibilities of the developed sensor for a general probe-moving measurement device and for probe-rotating AFM were verified. Moreover, a simple and precise measurement of alignment between centers of rotator and probe tip in probe-rotation AFM was experimentally demonstrated using the developed sensor.
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